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| Topic: |
Technology
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| Number of pages / Number of words: |
4 / 882 |
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Then another layer of material is deposited and the first layer selectively etched away as shown in the figure resulting in the required MEMS.
Comb drives actuators and electrostatic motors can be fabricated using this technique.
Fig: The processes involved in Silicon Micromachining technique.
The LIGA process is used to make MEMS with a higher accuracy...
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Actuators in MEMS are made using either piezoelectric effect or shape memory alloys.
Fig: Actuator using piezoelectric effect
Application of MEMS:
As MEMS are smart the applications one can conjure for them is limitless. On one hand scientist in University of California, Berkeley are developing dust particles which gather information about the weather while on the other MEMS are already being used in the automotive industry as accelerometers for triggering airbags...
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